Steady-state, glow discharge plasma

摘要

A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. The electrodes are located within an enclosure capable of maintaining an atmosphere other than atmospheric air between the electrode surfaces. Space between the electrodes is occupied by a noble gas such as helium, neon, argon, etc. or mixtures thereof.