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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH0734240(A)
申请公布日期
1995.02.03
申请号
JP19930196737
申请日期
1993.07.15
申请人
NEC CORP
发明人
SEKINE MAKOTO
分类号
C23C14/34;C23C14/35;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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