| 摘要 |
PURPOSE:To surely eliminate the generation of cracks in cutting work and the uneven thickness of an insulating layer by suppressing the generation of warpage in the cooling process after the hot-press baking. CONSTITUTION:A multi-layer ceramic substrate 11 is produced by laminating ceramic green sheets 1, 5 and baking the obtained laminate 8 with a hot press. In above process, the sintered product 10 obtained by the baking of the laminate 8 is cooled under application of pressure in the laminating direction of the sintered material. |
