发明名称 |
PROCESSED PRODUCT OF NEEDLE SINGLE CRYSTAL AND ITS PRODUCTION |
摘要 |
PURPOSE:To obtain a processed product of a needle single crystal of large buckling load high height accuracy by removing the top alloy part from the needle single crystal formed by the VLS growth method. CONSTITUTION:This processed product of a needle single crystal is obtained by removing the top alloy part of (A) a needle single crystal having 1 to 500 aspect ratio formed by the VLS growth method or removing the top alloy part of (B) a needle single crystal having 1 to 500 aspect ratio formed by the VSL growth method, and at least whose side surface is coated with an electroconductive film of 0.1 to 10mum thickness. |
申请公布号 |
JPH0733598(A) |
申请公布日期 |
1995.02.03 |
申请号 |
JP19930185050 |
申请日期 |
1993.07.27 |
申请人 |
DENKI KAGAKU KOGYO KK |
发明人 |
AMAMIYA MASARU;KATO KAZUO |
分类号 |
C30B11/12;C30B29/62;G01Q60/16;G01Q60/38;G01Q70/08;G01Q70/16;G01R1/067;H01B1/00;H01L21/66;H01L29/06;(IPC1-7):C30B29/62 |
主分类号 |
C30B11/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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