发明名称 PROCESSED PRODUCT OF NEEDLE SINGLE CRYSTAL AND ITS PRODUCTION
摘要 PURPOSE:To obtain a processed product of a needle single crystal of large buckling load high height accuracy by removing the top alloy part from the needle single crystal formed by the VLS growth method. CONSTITUTION:This processed product of a needle single crystal is obtained by removing the top alloy part of (A) a needle single crystal having 1 to 500 aspect ratio formed by the VLS growth method or removing the top alloy part of (B) a needle single crystal having 1 to 500 aspect ratio formed by the VSL growth method, and at least whose side surface is coated with an electroconductive film of 0.1 to 10mum thickness.
申请公布号 JPH0733598(A) 申请公布日期 1995.02.03
申请号 JP19930185050 申请日期 1993.07.27
申请人 DENKI KAGAKU KOGYO KK 发明人 AMAMIYA MASARU;KATO KAZUO
分类号 C30B11/12;C30B29/62;G01Q60/16;G01Q60/38;G01Q70/08;G01Q70/16;G01R1/067;H01B1/00;H01L21/66;H01L29/06;(IPC1-7):C30B29/62 主分类号 C30B11/12
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