PRODUCTION OF OXIDE FILM AND DEVICE THEREFOR

摘要

PURPOSE:To improve the quality of a formed oxide film without leaving an alkyl group in the film by introducing a liq. raw material such as alcoholates in a dry state into a reaction chamber along with a carrier gas, and chemically growing the film in a vapor phase. CONSTITUTION:The liq. raw material 1 such as alcoholates or metal carboxylates is stored in a closed container 2. The raw material 1 with the temp. controlled is introduced into a reduced-pressure vaporization vessel 6 from the container 2 through a conduit 4, and one hundred-percent vaporized. The gaseous raw material 1 and the carrier gas introduced from a carrier gas conduit 13 are mixed in the vessel 6 to form a dry gaseous raw material. A liq. flow controller 5 is provided at the midway of the conduit 4. The raw material 1 is transported by the pressure difference between the container 2 and the vessel 6. The raw material 1 is further transported to a reduced-pressure reaction chamber 14 wherein chemical vapor growth is carried out, and an oxide film id formed.