METHOD FOR PULLING UP SILICON SINGLE CRYSTAL AND APPARATUS THEREFOR,申请号JP19930179276-传众专利搜索

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发明名称	METHOD FOR PULLING UP SILICON SINGLE CRYSTAL AND APPARATUS THEREFOR
摘要
申请公布号	JPH0733588(A)	申请公布日期	1995.02.03
申请号	JP19930179276	申请日期	1993.07.20
申请人	TOSHIBA CORP	发明人	KOJIMA MASAKATSU
分类号	C30B15/20;H01L21/208;(IPC1-7):C30B15/20	主分类号	C30B15/20
代理机构		代理人
主权项
地址

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