发明名称 SURFACE POLISHING DEVICE WITH ABRASIVE LIQUID SPLASH PREVENTIVE MECHANISM
摘要 <p>PURPOSE:To provide a splash preventive mechanism of simple structure capable of certainly preventing splash of an abrasive liquid dropping from a surface plate and not disturbing maintenance and inspection as well as supplying and offtaking of a work. CONSTITUTION:On the outer periphery of a surface plate 11, an brasive liquid splash preventive jig 24 of a short and cylindrical shape to surround the surface plate 11 is integrally installed in the state of keeping a required interval between the surface plate 11 and its outer periphery, an abrasive liquid dropping from the marginal part of the surface plate 11 is caught by the preventive jig 24 and dropped inside of a recovery groove 18.</p>
申请公布号 JPH0732263(A) 申请公布日期 1995.02.03
申请号 JP19930200409 申请日期 1993.07.20
申请人 SPEEDFAM CO LTD 发明人 ICHIKAWA MASAHIRO
分类号 B24B55/04;B24B37/00;B24B57/02;(IPC1-7):B24B55/04 主分类号 B24B55/04
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