SEMICONDUCTOR MANUFACTURING DEVICE,申请号JP19880152059-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号	JPH01318235(A)	申请公布日期	1989.12.22
申请号	JP19880152059	申请日期	1988.06.20
申请人	KAWASAKI STEEL CORP	发明人	JOGO AKIRA
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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