发明名称 MAGNETIC RECORDING MEDIUM AND ITS MANUFACTURE
摘要 <p>An inexpensive high-density recording medium which is increased in coercive force without using expensive ferromagnetic metallic layer. In a magnetic recording medium on the substrate of which a ferromagnetic metallic layer is formed on a substrate with a metallic underlying layer in between and which utilizes reversal of magnetization, the oxygen concentration in the ferromagnetic metallic layer is below 100 wt. ppm, and in addition, the oxygen concentration in the metallic base layer is also below 100 wt. ppm. In a method of manufacturing a magnetic recording medium on the substrate of which the metallic base layer and ferromagnetic metallic layer are successively formed by sputtering, the impurity concentration of Ar gas used for the formation of the layers is below 10 ppb. Before forming the metallic base layer, in addition, the surface of the substrate is cleaned by high-frequency sputtering using Ar gas the impurity concentration of which is 10 ppb and the surface section of the substrate is partially removed to a depthof 0.2-1 nm.</p>
申请公布号 WO1995003603(P1) 申请公布日期 1995.02.02
申请号 JP1994001184 申请日期 1994.07.19
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