发明名称 Table-adjusting device
摘要 The invention relates to a table-adjusting device (10) for the linear movement of an adjusting table (16) in an X-Y-plane and for rotating the adjusting table (16) in this plane. Provided in this table-adjusting device (10) are two first drive units (18, 20) arranged parallel to one another at a distance apart for a movement in the X-direction, a second drive unit (34) arranged perpendicularly to them for the movement in the Y-direction, two joints (30, 32) which are arranged in the adjusting table (16) and are connected to the adjusting device (10) and are each arranged at the intersections of the axes of the first and second drive units (18, 20; 34), and also in each case one bearing (26, 28, 40) arranged between the joints (30, 32) and the drive units (18, 20; 34). In this case, the bearings (26, 28) arranged between the first drive units (18, 20) and the respective joint (30, 32) absorb forces in the X-direction and are displaceable in the Y-direction, and the bearing (40) arranged between the second drive unit (34) and the joint (30) absorbs forces in the Y-direction and is displaceable in the X-direction. <IMAGE>
申请公布号 DE4325450(A1) 申请公布日期 1995.02.02
申请号 DE19934325450 申请日期 1993.07.29
申请人 B. BACHER GRAPHISCHE GERAETE GMBH, 78573 WURMLINGEN, DE 发明人 PARSCHAU, ROLAND, 78530 TUTTLINGEN, DE;KIENZLE, ALFRED, 88699 FRICKINGEN, DE;MATTES, KLAUS, 78870 MUEHLHEIM, DE
分类号 G12B5/00;(IPC1-7):G12B5/00;H01L21/68 主分类号 G12B5/00
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