| 摘要 |
According to the invention, a method for testing test cards is proposed which are equipped with contact probes which are brought into contact with the contact surfaces of integrated circuits in order to test these, a camera 6 being used for detecting at least one impression A-1 of a contact probe on a contact surface and an image of the impression A-1 being supplied to an evaluating device 7 which, on the one hand, compares the image with stored patterns and supplies a qualitative assessment of the probe impression A-1 and, on the other hand, calculates the optimum theoretic adjustment from the deviation of the probe impression from the nominal position, as a result of which maladjusted contact probes are detected in accordance with particular objective criteria and, at the same time, a corresponding possible correction can be proposed; in which arrangement, the calibration and alignment of the test device can be carried out by means of a calibration pattern 8 which is at least partially detected by the camera 6 and exhibits an accurately defined raster. <IMAGE> |
