Plasma deposition process,申请号GB19920011242-传众专利搜索

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发明名称	Plasma deposition process
摘要
申请公布号	GB2267291(B)	申请公布日期	1995.02.01
申请号	GB19920011242	申请日期	1992.05.27
申请人	* NORTHERN TELECOM LIMITED	发明人	RUDOLF AUGUST HERBERT * HEINECKE;PETER GORDON * ELDRIDGE
分类号	C23C16/40;H01L21/316;(IPC1-7):C23C16/30;H01L21/70	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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