| 摘要 |
The height of a surface (25) along an axis (4) is determined by measuring the axial position of an irradiated spot (31) formed on the surface at the intersection of the surface and the axis. Radiation reflected by the surface and collected by a lens (8) forms an image spot (32) on the axis (4). The position of the image spot is determined by measuring the intensity of the radiation at at least three positions along the axis by means of a detection unit (35). The output signals (44, 44') of the detection unit are processed in an electronic means (43) for determining the position of the highest radiation intensity and for supplying a signal (43') whose magnitude represents the axial position of the image spot (32), hence, of the irradiated spot (31). <IMAGE> |
