Wellenleiter und Verfahren zu dessen Herstellung

摘要

A waveguide comprises an organic substrate 2 e.g. of a polymer such as polycarbonate a waveguide layer 1 and an intermediate layer 8 which prevents a substantial amount of energy from penetrating into the relatively highly absorbent polymer material. The waveguide material may be, for wavelengths of 400nm to 1000nm, TiO2, TaO5, ZrO2, Al2O3, SiO2-TiO2, HfO2, Y2O3, Nb2O5, silicon nitride, oxynitride (SiOxNy, HfOxNy, AlOxNy TiOxNy, TaOxNy) and MgF2 or CaF2, and for wavelengths> 1000nm silicon, SiOx, Ge, Ga As or GaAlAs. The intermediate layer material, may be SiO2, or an SiO2, TiO2-mixture or a material with Si3N4, such as Si3N4 or a mixture with Si3N4, and may be applied by a vacuum coating process. <IMAGE>