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发明名称
摘要
申请公布号
JPH079899(B2)
申请公布日期
1995.02.01
申请号
JP19890317435
申请日期
1989.12.06
申请人
发明人
分类号
H01L21/304;B05B1/04;B24C1/00;C01B31/22;H01L21/00;(IPC1-7):H01L21/304
主分类号
H01L21/304
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代理人
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地址
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