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发明名称
Semiconductor substrate processing apparatus.
摘要
申请公布号
EP0505994(B1)
申请公布日期
1995.02.01
申请号
EP19920105073
申请日期
1992.03.24
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
OHTAKI, TOSHIO;IKEDA, HITOSHI;YAMADA, MASATO;TAKENAKA, TAKAO
分类号
F27B7/20;C30B19/06;H01L21/00;H01L21/208;H01L21/22;H01L21/31;(IPC1-7):H01L21/00;C30B19/08
主分类号
F27B7/20
代理机构
代理人
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地址
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