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发明名称
摘要
申请公布号
JPH079908(B2)
申请公布日期
1995.02.01
申请号
JP19870318576
申请日期
1987.12.18
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
EZAWA HIROKAZU;USAMI TOSHIRO;ENDO TAKAYUKI
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/60
代理机构
代理人
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