| 摘要 |
PURPOSE:To easily decide the kind of a thin film by measuring the physical quantity related to the quantity of elements of an ambience taken into the thin film and comparing the physical quantity with a preliminarily formed calibration value. CONSTITUTION:The physical quantity related to the quantity of elements of an ambience taken into a thin film the kind of which is known or the physical quantity related to an electric resistance of the thin film is measured beforehand to form a calibration value. Then, the same physical quantity of a to-be-detected thin film is measured and compared with the formed calibration value. Accordingly, it becomes possible to decide the kind of a thin film having the calibration value agreeing with the measured value as the kind of the to-be-detected thin film. The kind of the thin film is easily and surely decided only by analyzing the thin film according to the Auger electron spectroscopy(AES) or measuring the specific resistance of the thin film. Further, this measurement is carried out in a non-destructive manner in a short time, enabling the inspection of the whole number of samples. |
