| 摘要 |
A workpiece to be ground is immersed in a processing solution with abrasive grains suspended therein. The processing solution is contained in an ultrasonic processing tank equipped with an ultrasonic vibrator. Ultrasonic energy is radiated from said ultrasonic vibrator into said processing solution to ground surfaces of the workpiece. The processing solution is drawn from the ultrasonic processing tank, cooled to a temperature lower than a boiling point thereof, deaerated, and then returned to the ultrasonic processing tank.
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