| 摘要 |
PURPOSE:To advance the delivery date and to simplify the control of the control system for semiconductor circuit manufacturing process. CONSTITUTION:When a mask is not obtained by detecting a mask master from the clip number, which is obtained by detecting lot master by a lot number in a lithographic process, a lithography process is brought into a stand-by state by a stand-by means. The rank of the process before the lithography process, in which mask is differenciated by rank, is registered as the prescribed value irrespective of the rank, a manufacturing operation is started to the lot master by registering the rank as the prescribed value, the rank of lot master is changed to the rank of the required semiconductor circuit from the prescribed value, and the photolithography process, in which mask is differentiated by rank, and the succeeding processes are conducted. |
