Method of etching using a silver/silver oxide reference electrode

摘要

Generally, the invention includes a method of wet electrochemical etching of a substrate with an anisotropic etchant using a silver/silver oxide (Ag/Ag2O) reference electrode. The silver/silver oxide reference electrode can be used with electrochemical etch-stop techniques to fabricate a variety of semiconductor devices including microsensors and microactuator in a variety of anisotropic etchants. The silver/silver oxide reference electrode eliminates the need to use glass or plastic tubes.