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发明名称
FILMING SYSTEM
摘要
申请公布号
JPH0729830(A)
申请公布日期
1995.01.31
申请号
JP19930169486
申请日期
1993.07.09
申请人
HITACHI LTD
发明人
WAKABAYASHI HIROAKI;SAITO HIDEMI;TAGAWA AKIHIKO;ABE TOSHIHIKO
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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