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发明名称
METHOD AND APPARATUS FOR GRINDING
摘要
申请公布号
JPH0729862(A)
申请公布日期
1995.01.31
申请号
JP19930171332
申请日期
1993.07.12
申请人
TOSHIBA CORP
发明人
SATO TAKEO;KAWAI KAORU
分类号
H01L21/304;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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