| 摘要 |
<p>PURPOSE:To provide a developing device for color filters by which uniform development patterns are obtainable. CONSTITUTION:This developing device is used at the time of forming the color filters by applying coloring resins formed by dispersing at least coloring materials into photosensitive resin on the substrate, then temporally curing the resin by heating, then patterning the resin by a photolithography method and developing the resin. The developing device for the color filters includes a developing tank which houses a developer 4 in which a substrate is immersed, an ultrasonic oscillator 3 which generates ultrasonic waves to apply vibrations to the developer 4 and at least >=2 sheets of rotatable reflection diffusing plates 2 which are provided between the ultrasonic oscillator 3 and the substrate and reflect or diffuse the vibrations of the ultrasonic waves.</p> |
