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发明名称
ROTARY SUBSTRATE DRYING APPARATUS
摘要
申请公布号
JPH0729866(A)
申请公布日期
1995.01.31
申请号
JP19930194033
申请日期
1993.07.09
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
YOSHITANI MITSUAKI
分类号
B08B5/02;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B5/02
代理机构
代理人
主权项
地址
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