| 摘要 |
PURPOSE:To provide a production method for a optical waveguide by which an optical waveguide with little connection loss and good property of glass film can be produced. CONSTITUTION:Glass fine particle layers for a buffer and a core are dposited on a Si substrate 1 and sintered to form a buffer layer 2 and a core layer 3. Then, the core layer 3 is patterned, on which a glass fine particle layer 4a for a clad is formed. The substrate is held in a furnace at 800-900 deg.C initial temp. x for time t1. The temp, in the furnace is raised at heating rate alpha of 10-20 deg.C per min. till the temp. reaches the sintering temp. y which is lower than the temp. to change the core layer 3 into transparent glass by 50-150 deg.C. Further the substrate is maintained at this sintering temp. y for 180-300mim. for sintering. In this process, the total time T2 of the temp. rising time S1 and the holding time t2 at the sintering temp. is specified to 230-350min. By this method, a good overclad layer 4 is formed. |
