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发明名称
MAGNETRON TYPE SPUTTERING CATHODE
摘要
申请公布号
JPH0726377(A)
申请公布日期
1995.01.27
申请号
JP19930170302
申请日期
1993.07.09
申请人
UBE IND LTD
发明人
KAMATANI YOSHITO
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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