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发明名称
PROCESS OF MANUFACTURE OF SOLID PLANAR SOURCE OF BORON DIFFUSION BASED ON BORON NITRIDE
摘要
申请公布号
RU1454157(C)
申请公布日期
1995.01.27
申请号
SU19864102830
申请日期
1986.07.28
申请人
DENISYUK VLADIMIR A
发明人
DENISYUK VLADIMIR A
分类号
H01L21/225;(IPC1-7):H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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