| 摘要 |
PURPOSE:To obtain a sintered aluminum nitride having excellent heat conductivity and capable of bonding with metal by forming a mixed layer of calcium- aluminum oxide with yttrium-aluminum oxide on an AIN layer. CONSTITUTION:100 pts.wt. of powdery AIN raw material is compounded with 0.5-10 pts.wt. of a mixed powder of CaF2 with YF3 and a binder and this is molded to obtain a molded body. After removing the binder by preliminary baking of the molded body, the obtained molded body is baked at 1550-1600 deg.C for 2-8hr in a non-oxidizing atmosphere to form a mixed-layer 12 of calcium- aluminum oxide with yttrium-aluminum oxide of 0.5-5mum in thickness on a surface of the AIN layer 11. |
