PRECISE POSITIONING APPARATUS

摘要

Apparatus comprising driving apparatus coupled to a load, sensing apparatus for sensing at least one of position, velocity and acceleration being coupled to the driving apparatus, apparatus for determining input power to the driving apparatus, inaccuracy compensation control apparatus receiving a first input from the sensing apparatus and a second input from the apparatus for determining input power and providing a compensated output indication indicating at least one of the position, velocity, force and acceleration of the load on the basis of information regarding non-linearities between the driving apparatus and the load including information indicative of whether or not the load is driving the driving apparatus or the driving apparatus is driving the load. 44