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发明名称
Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine.
摘要
申请公布号
EP0412393(B1)
申请公布日期
1995.01.25
申请号
EP19900114605
申请日期
1990.07.30
申请人
ETEC, INC.
发明人
DEVORE, WILLIAM J.
分类号
H01L21/027;H01J37/244;H01J37/317;H01L21/30;(IPC1-7):H01J37/244;H01J37/304
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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