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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0722421(A)
申请公布日期
1995.01.24
申请号
JP19930163721
申请日期
1993.07.02
申请人
HITACHI LTD
发明人
SAKAZUME TATSUMI
分类号
H01L23/52;H01L21/3205;H01L23/29;H01L23/31;(IPC1-7):H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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