CLEANING EQUIPMENT FOR SILICON WAFER,申请号JP19930159343-传众专利搜索

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发明名称	CLEANING EQUIPMENT FOR SILICON WAFER
摘要
申请公布号	JPH0722366(A)	申请公布日期	1995.01.24
申请号	JP19930159343	申请日期	1993.06.29
申请人	KAWASAKI STEEL CORP	发明人	UCHIDA NOBUO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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