| 摘要 |
PURPOSE:To stably detect foreign matters and a defective pattern from an object to be inspected so as to distinguish the detected defective pattern from a normal pattern by picking up the image of the object and outputting two-dimensional, picture information prepared by compiling the information of each picture element. CONSTITUTION:An object 11 to be inspected is irradiated with the light from a light source 10 and the surface image of the object 11 is converted into electric signals by means of an image pickup device 12. The electric signals are converted into digital signals at every picture element by means of an A/D converter 13 and stored in a frame memory 14. A CPU 15 controls the turning on/off of the light source, the image picking-up timing of the device 12, converting timing of the converter 13, and storing timing of the digital signals in the memory 14, etc., in accordance with commands from an input device 16 and, at the same time, discriminates such foreign matters as dust, etc., on the object 11 and a defective pattern from a normal pattern by processing the digital pictures stored in the memory 14. Discriminated foreign matters and defective pattern are displayed on a monitor 17. |
