| 摘要 |
PURPOSE:To avoid contact between the probe and the surface of a sample by controlling the shift of the probe in the direction normal to the sample along with the relative position. CONSTITUTION:Upon start of scanning, a scanning circuit 14 delivers a signal for driving a piezoelectric element 7 in the direction X and shifts a probe 1 under variable current mode. The scanning circuit 14 also delivers a signal for switching a drive circuit 12 and applies a predetermined voltage to a piezoelectric element 9 so that the probe 1 is sustained at a predetermined height from a referential position of the sample 2. When the probe 1 is returned, the scanning circuit 14 delivers a signal for switching between the drive circuit 12 and a servo circuit 13 and then applies a feedback signal to the piezoelectric element 9 in Z direction so that the tunnel current has a set value thus controlling the probe 1 in Z direction and shifting the probe 1 by a single line in Y direction.
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