SHEET-TYPE DRY ETCHING EQUIPMENT AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD BY USING THE SAME,申请号JP19930144143-传众专利搜索

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发明名称	SHEET-TYPE DRY ETCHING EQUIPMENT AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD BY USING THE SAME
摘要
申请公布号	JPH0722386(A)	申请公布日期	1995.01.24
申请号	JP19930144143	申请日期	1993.06.16
申请人	NEC YAMAGUCHI LTD	发明人	NIIYAMA SADAFUMI
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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