发明名称 TREATMENT EQUIPMENT
摘要 <p>PURPOSE:To insulate heat from environment by reflecting heat emitted from a stand caused by a heater. CONSTITUTION:A heat-insulating body 32 made of titanium nitride as main material is arranged on a circumference of a stand 21 having a heater. Thus, the heat generated by the heater is reflected by the heat insulating body to achieve insulation from the circumference of the stand. The titanium nitride has low melting point and stabilized so that there will be no contaminated substance even under high temperature.</p>
申请公布号 JPH0722501(A) 申请公布日期 1995.01.24
申请号 JP19930185518 申请日期 1993.06.29
申请人 TOKYO ELECTRON LTD 发明人 ARAMI JIYUNICHI;DEGUCHI YOICHI
分类号 H01L21/205;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 H01L21/205
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