发明名称 METHOD AND APPARATUS FOR SENSING FOREIGN MATTER
摘要 <p>PURPOSE:To enable sensing of foreign matters in a container with high precision and at high speed. CONSTITUTION:An analysis gas 10 developing from foreign matters in a container is sucked and sampled by a sampling prove and fed into a detector, and this analysis gas 10 is doped with a third component gas 1 to generate a compound by reaction. This compound is ionized by a radioactive isotope 19, and a signal developing along with this ionization is transmitted to a data processor and processed as a specific signal of particles. In this case, ion particles adhere to a focusing ring 21; therefore, the focusing ring 2 is cleaned by introducing drift air 6 from outside with the result that the effect of trapping a signal developing along with ionization is enhanced by the focusing ring 21.</p>
申请公布号 JPH0720092(A) 申请公布日期 1995.01.24
申请号 JP19930183244 申请日期 1993.06.30
申请人 MITSUBISHI HEAVY IND LTD 发明人 TSUBAKI YASUHIRO;MATSUGAMI MANABU;HATANO SHIGEKAZU;NAGANO HAYAMI
分类号 G01N27/62;G01N27/64;(IPC1-7):G01N27/62 主分类号 G01N27/62
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