| 摘要 |
<p>PURPOSE:To remove an attribution property to a man, to reduce overlapping work and also to improve work efficiency by using a code so as to relate with the various kinds of process condition in a semi-conductor. CONSTITUTION:Manufacturing process 12 in the manufacturing process flow of an optional kind 11, its process specification 14 and the plural lists 13 of a manufacturing institution, whereby manufacturing specification can be realized, have connecting relation. Then, the manufacturing condition of the respective institutions, for example, the manufacturing condition 15 of the optional institution for realizing process specification 14 is defined by executing relation with respective correspondence items expressed by an X axis, a Y axis and a Z axis. That is, the respective codes such as a process code, a standard code and an institution condition code are concretely set so that the process name, process specification, institution manufacturing condition, etc., of the various kinds of manufacturing process conditions are respectively and uniquely classified. Thus, information is classified in terms of three-dimensional structure by capturing relation with the manufacturing process flow of the semi-conductor, the specification of the respective kinds of manufacturing process and the manufacturing condition of the respective institutions and by organically connecting given information with the three kinds of codes.</p> |
