摘要 |
PURPOSE:To improve productivity by miniaturizing the device and facilitating the rapid adjustment. CONSTITUTION:This optical switch module has an optical waveguide substrate 32 which selectively changes over and connect the plural optical paths on an incident side and plural optical paths on an exit side by changing temp., thin- film heaters which are disposed on the substrate 32 and regulate temp. by regulating electric power and changing calorific value, a ceramic multilayered substrate 31 which is mounted with the substrate 31 on its front surface and a trimmable resistor 53 which regulates the electric power of the thin-film heaters. The resistor 53 is composed of a thick-film resistor and the resistor 53 is formed on the rear surface of the multilayered substrate 31. The resistor 53 is changed in its resistance value by laser trimming, by which the electric power of the thin-film heaters is regulated. As a result, the size over the entire part is reduced, the electric power regulation of the thin-film heater is facilitated and the time thereof is shortened. |