发明名称 Semiconductor chip mounting method and apparatus
摘要 The three-dimensional shape of the surface of a board (12) is measured, and the parallel degree between the board (12) and a semiconductor chip (10) is adjusted on the basis of the measurement result. A board mounting means (13) and a semiconductor chip holding means (11) are moved close to each other, and the semiconductor chip (10) is mounted on the board (12).
申请公布号 US5384000(A) 申请公布日期 1995.01.24
申请号 US19940205416 申请日期 1994.03.03
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 NISHIGUCHI, MASANORI
分类号 H01L21/60;H01L21/68;H05K13/04;(IPC1-7):H01L21/60 主分类号 H01L21/60
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