DRY ETCHING METHOD,申请号JP19930148906-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH0722391(A)	申请公布日期	1995.01.24
申请号	JP19930148906	申请日期	1993.06.21
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	KUBOTA MASABUMI;OKUNI MITSUHIRO
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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