发明名称 MOUNTING METHOD OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To eliminate delivery variation, cobwebbing, etc., of conventional die-bonding paste, for better workability and no void occurrence, and further to cope with any chip size. CONSTITUTION:The process wherein a bonding agent 1 is, with a thermoplastic resin used as a base binder, applied and then dried on a carrier film 2 as film- state and in wafer-size, so that a carrier sheet with a bonding agent is manufactured, and the process wherein the bonding agent 1 of the carrier sheet with a bonding agent is thermally transferred onto the rear surface of a wafer 4 then a wafer with a bonding agent is provided. Further, the process wherein the wafer with a bonding agent is diced for division into semiconductor elements 8 with bonding agent 1, and the process wherein the semiconductor elements 8 with bonding agent is peeled from a dicing tape 7 and then thermally adhered by pressing to an adherend 12 are included in a semiconductor element mounting method.
申请公布号 JPH0722440(A) 申请公布日期 1995.01.24
申请号 JP19930191918 申请日期 1993.07.06
申请人 TOSHIBA CHEM CORP 发明人 OKUNOYAMA TERU;ONISHI TATSUYA
分类号 H01L21/52;H01L21/58;H01L21/68;(IPC1-7):H01L21/52 主分类号 H01L21/52
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