FORMATION OF THIN FILM,申请号JP19930165644-传众专利搜索

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发明名称	FORMATION OF THIN FILM
摘要
申请公布号	JPH0722339(A)	申请公布日期	1995.01.24
申请号	JP19930165644	申请日期	1993.07.05
申请人	TOSHIBA CORP;TOKYO ELECTRON LTD;TOKYO ELECTRON YAMANASHI KK	发明人	ITO HITOSHI;SUGURO KYOICHI;HAYASAKA NOBUO;OKANO HARUO;HIMORI SHINJI;NAGASEKI KAZUYA;MOCHIZUKI SHUJI
分类号	H01L21/205;C23C16/04;C23C16/34;H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/205;H01L21/306	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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