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发明名称
THIN FILM FORMING METHOD AND DEVICE
摘要
申请公布号
JPH0722328(A)
申请公布日期
1995.01.24
申请号
JP19930151822
申请日期
1993.06.23
申请人
HITACHI LTD;HITACHI VLSI ENG CORP;HITACHI ELECTRON ENG CO LTD
发明人
UDO TSUTOMU;KAWAHARA MASAHITO;KASAHARA OSAMU
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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