摘要 |
PURPOSE:To obtain a title apparatus which can evaluate a sample contactlessly and accurately. CONSTITUTION:This sample evaluator A1 by ultrasonic oscillation measurement is so constructed that when measuring at least two pulses of ultrasonic oscillation induced by a material 1 by irradiating the material 1 with pulse laser light to evaluate a material on the basis of a variation in these two pulses, pulse laser light irradiating the material 1 gets a spot diameter corresponding to the thickness of the material 1 by a lens 3. Further, there is a case where a component of less than a frequency corresponding to the thickness of the material is filtered out of this pulse by a low frequency cutoff filter 6b. The above-mentioned constitution enables a sample to be evaluated contactlessly and accurately. |