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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0720202(A)
申请公布日期
1995.01.24
申请号
JP19930150819
申请日期
1993.06.22
申请人
KAWASAKI STEEL CORP
发明人
SATOU MASAYA
分类号
G01R31/28;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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