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发明名称
VERFAHREN ZUR HERSTELLUNG EINES KONTAKTES ZU EINER GRABENKONDENSATORELEKTRODE
摘要
申请公布号
AT139059(T)
申请公布日期
1996.06.15
申请号
AT19930902067T
申请日期
1993.02.01
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
ROESNER, WOLFGANG, DR.;HOFMANN, FRANZ, DR.;RISCH, LOTHAR, DR.
分类号
H01L21/76;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/82
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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