| 摘要 |
PURPOSE:To control an energy supply quantity to an optimum quantity and to surely execute cutting by providing an exit laser beam optical path with a beam splitter and branching energy-component pulses for cutting. CONSTITUTION:The optical path 12 for the laser beam emitted from a laser oscillator 11 is provided with the beam splitter 1 and the energy E2-component pulses 12B for cutting are branched by this splitter. The split pulses are fed back to a half mirror 4 by mirrors 2, 3 in order to be passed through a circuit constituted as a delay element (delay circuit) 5. The pulses are recombined with the rectilinearly advancing energy E1-component pulses 12A for preheating branched likewise by the beam splitter 1. A body 17 to be processed is irradiated with these beams through a mirror 13A, the beam splitter 14 and an objective lens 15. |
