发明名称 |
Surface inspection system and method of inspecting surface of workpiece |
摘要 |
A surface inspection system and methods of inspecting a surface of a workpiece are provided for detecting particles, defects, or other surface characteristics in or on a surface of the workpiece. The surface inspection system preferably has a transporter arranged for transporting a workpiece along a material path and a rotator associated with the transporter and arranged for rotating a workpiece during translational travel along the material path. A scanner is positioned and arranged for scanning a surface of a workpiece during rotational and translational travel along the material path. The scanner preferably includes a light source arranged to generate a light beam therefrom and a deflector positioned to receive the light beam and arranged for deflecting the light beam along a predetermined scan path across a surface of the workpiece as the workpiece rotationally and translationally travels along the material path. A collector also is preferably arranged for collecting light specularly reflected and scattered from the surface of the workpiece during rotational and translational travel along the material path. |
申请公布号 |
AU5092196(A) |
申请公布日期 |
1996.09.23 |
申请号 |
AU19960050921 |
申请日期 |
1996.03.04 |
申请人 |
ADE OPTICAL SYSTEMS CORPORATION |
发明人 |
LEE D CLEMENTI;MICHAEL E FOSSEY |
分类号 |
G01N21/956;G01N21/89;G01N21/94 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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